Fluorescent X-ray film thickness meter

When X-rays drawn from the W target are applied to a metal thin film sample (such as a plating film), fluorescence X-rays are released according to the elements that make up the sample. The strength is measured separately for each energy (detector: proportional count tube, PIN detector). Since there is a correlation between film thickness and fluorescent X-ray strength, the film thickness can be determined by the obtained fluorescence X-ray strength.

It is possible to know the thickness of the metal thin film (single-layer film, two-layer film, alloy film) on the material (metal, plastic). Since the sample is only irradiated with X-rays, it is in principle non-destructive measurement (however, depending on the size of the sample, it may not be possible to measure it without destructiveness). The measurable element range is from Ti (titanium) No. 22 to U (uranium) No. 92.

Fluorescent X-rays from the measuring part must be detected, so if there is a shield between the detector and the measuring point, it cannot be measured (for example, the thickness of the inner part of a concave sample).

In combinations containing the same metal (e.g. copper plating film on brass, etc.), it is impossible to separate the obtained fluorescence X-rays, so the membrane thickness cannot be measured.

Device model number: FT9400 manufactured by Hitachi High-Tech Science Co., Ltd.
Date of introduction: November, 2014

Thickness test Fluorescent X-ray film thickness meter 2,400 yen per measuring point per sample.

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